Bi-stable MEMS cantilever heat harvester

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United States of America Patent

PATENT NO 9972763
SERIAL NO

15017609

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Abstract

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A bi-stable micro-electrical mechanical system (MEMS) heat harvester is provided. A bi-stable MEMS cantilever located between a hot temperature surface and a cold temperature surface, and is made up of a first MEMS material layer, having a first coefficient of thermal expansion. A second MEMS material layer is in contact with the first MEMS material layer, and has a second coefficient of thermal expansion less than the first coefficient of thermal expansion. A tensioner, made from a material having a tensile stress greater than the stress of the first or second MEMS materials, is connected to the cantilever. The heat harvester also includes a mechanical-to-electrical power converter, which may be a piezoelectric device or an electret device. The bi-stable MEMS cantilever may include a thermal expander having a coefficient of thermal expansion greater than the second coefficient of thermal expansion. The thermal expander is connected to the tensioner.

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Patent Owner(s)

Patent OwnerAddress
SHARP KABUSHIKI KAISHA22-22 NAGAIKE-CHO ABENO-KU OSAKA-SHI OSAKA 545-8522

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pan, Wei Vancouver, US 172 1920
Yuan, Hao-Chih Vancouver, US 16 544
Zhan, Changqing Vancouver, US 31 621

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