Polarization inspection device
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United States of America Patent
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May 15, 2018
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app pub date -
Dec 16, 2016
filing date -
Dec 21, 2015
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Abstract
A polarization inspector for inspecting an inspection target, the polarization inspector having a polarization divider for spatially dividing at least a reflected beam of light from the inspection target by irradiating an illumination beam into divided beams of lights mutually different in polarization direction; one or more optical receivers for receiving the divided beams of lights and generating an image signal based on the divided beams of lights; and a processor for calculating at least one of an elliptical azimuth angle, a polarization degree and a polarization component intensity from the image signal.
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