Curved grating structure manufacturing method, curved grating structure, grating unit, and x-ray imaging device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 15, 2018
Issued Date -
N/A
app pub date -
Oct 2, 2014
filing date -
Oct 25, 2013
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
In one aspect, the present invention provides a curved grating structure manufacturing method which comprises: a grating forming step of forming, in one surface of a grating-forming workpiece, a grating region in which a plurality of members mutually having the same shape are periodically provided; a stress layer forming step of forming a stress layer capable of generating stress, on a grating plane-defining surface of the grating region; a boding step of bonding a support substrate to the stress layer; a polishing step of polishing the other surface of the grating-forming workpiece on a side opposite to the one surface having the support substrate bonded thereto; and a peeling step of peeling off the support substrate from the stress layer, wherein the polishing step includes performing the polishing to allow the grating-forming workpiece to be curved by a stress arising from the stress layer, after the peeling step.
First Claim
Family
International Classification(s)
- C25D:PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC ....
- G21K:TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNET....
- G01N:INVESTIGATING OR ANALYSING MATERIALS BY DETERMININ....
- A61B:DIAGNOSIS; SURGERY; IDENTIFICATION
- G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G01T:MEASUREMENT OF NUCLEAR OR X-RADIATION
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully