Vacuum process chamber component and methods of making
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United States of America Patent
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May 15, 2018
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app pub date -
Sep 28, 2010
filing date -
Sep 28, 2010
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Abstract
A vacuum process chamber component comprising two separate pieces with an o-ring between the pieces and solder bonded together is described. The component may be an electrostatic chuck comprising a ceramic electrostatic puck and a metal baseplate with at least one o-ring therebetween and joined by a solder bond is described. Methods of making and using vacuum process chamber component are also described.
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