Pulsed light beam spectral feature control
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United States of America Patent
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May 8, 2018
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N/A
app pub date -
Mar 24, 2017
filing date -
Mar 24, 2017
priority date (Note) -
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Abstract
A spectral feature of a pulsed light beam produced by an optical source is adjusted by receiving an instruction to change a spectral feature of the pulsed light beam from a value in a first target range to a value in a second target range; regulating a first operating characteristic of the optical source; determining an adjustment to a second actuatable apparatus of the optical source; and adjusting the second actuatable apparatus by an amount based on the determined adjustment. The first operating characteristic is regulated by adjusting a first actuatable apparatus of the optical source until it is determined that the first operating characteristic is within an acceptable range of values. The adjustment to the second actuatable apparatus is determined based at least in part on: a relationship between the adjustment of the first actuatable apparatus and a spectral feature of the light beam, and the second target range.
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