Pick-and-place tool for packaging process

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United States of America Patent

PATENT NO 9966357
SERIAL NO

14811466

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Abstract

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A method includes moving a first bond head along a first guide apparatus for a first loop. The first guide apparatus is configured in a ring shape. The method also includes picking up a first die using the first bond head during the first loop, and aligning the first die with a first package substrate. The aligning the first die with the first package substrate includes moving the first package substrate in a first direction and a second direction. The first direction and the second direction are contained in a first plane parallel to the first loop. The method further includes placing the first die over the first package substrate during the first loop.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN RD 6 SCIENCE-BASED INDUSTRIAL PARK HSIN-CHU 300-77 R O C

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsiao, Yi-Li Hsin-Chu, TW 62 1239
Huang, Ying-Jui Zhubei, TW 50 379
Hwang, Chien Ling Hsin-Chu, TW 115 2469

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