Substrate processing apparatus, method for manufacturing semiconductor device, and non-transitory computer-readable recording medium
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United States of America Patent
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May 8, 2018
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N/A
app pub date -
Sep 19, 2014
filing date -
Sep 30, 2013
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Abstract
An apparatus and method capable of reducing the footprint of substrate processing system. An apparatus includes a housing chamber including a housing cabinet which houses housing containers for housing substrates, and a housing container carrying mechanism provided on the ceiling of the housing chamber and configured to carry the housing containers.
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