Forming nanotips

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United States of America Patent

PATENT NO 9966253
SERIAL NO

15054005

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Abstract

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A nanotip apparatus which includes nanotips arranged in a pattern on a semiconductor base. Each of the nanotips have a pointed tip portion and a base portion in contact with the semiconductor base. Further, each of the nanotips include a gradient of silicon germanium (SiGe) with the highest concentration of germanium being at the pointed tip portion and the lowest concentration of germanium being at the base in contact with the semiconductor base. Also disclosed is a method in which the nanotips may be formed.

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Patent Owner(s)

Patent OwnerAddress
ELPIS TECHNOLOGIES INC1891 ROBERSTON ROAD SUITE 100 OTTAWA K2H 5B7

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Kangguo Schenectady, US 3099 32749
Divakaruni, Ramachandra Ossining, US 277 6009
Li, Juntao Cohoes, US 613 3837
Mochizuki, Shogo Clifton Park, US 314 2242

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