Method of fabricating conductive thin film

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United States of America Patent

PATENT NO 9966168
SERIAL NO

15391839

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Abstract

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A method of fabricating a conductive thin film includes the following steps: forming a polymer fiber made of a polymer and a metal precursor distributed in a surface layer near the surface of the polymer fiber; and applying a plasma treatment on the polymer fiber to concurrently etch the polymer and reduce the metal precursor in the surface layer of the polymer fiber. When the plasma treatment is completed, a metal membrane is formed on the surface of the polymer fiber.

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Patent Owner(s)

Patent OwnerAddress
NATIONAL CHENG KUNG UNIVERSITYNO 1 UNIVERSITY ROAD TAINAN CITY 701

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Hung-Tao Tainan, TW 3 6
Chen, In-Gann Tainan, TW 14 37
Cheng, Han-Hsuan Tainan, TW 1 1
Kuo, Chang-Shu Tainan, TW 6 7

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