Method and apparatus for generating a variable clock used to control a component of a substrate processing system
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United States of America Patent
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May 1, 2018
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N/A
app pub date -
Mar 10, 2014
filing date -
Mar 14, 2013
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Abstract
Methods and apparatus for generating a variable clock used to control a component of a substrate processing system are provided herein. In some embodiments, an apparatus for controlling a substrate processing system includes: a phase locked loop circuit for generating a relative clock that is phase locked to a variable frequency signal being used by a substrate processing chamber; and a controller, coupled to the phase locked loop circuit, for producing a control signal for a component of the substrate processing system, wherein the control signal is based upon the relative clock and an operating indicia of the substrate processing system.
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