Systems and methods for graphene mechanical oscillators with tunable frequencies
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United States of America Patent
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May 1, 2018
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app pub date -
Oct 23, 2014
filing date -
Oct 23, 2013
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Abstract
A nano-electro-mechanical systems (NEMS) oscillator can include an insulating substrate, a source electrode and a drain electrode, a metal local gate electrode, and a micron-sized, atomically thin graphene resonator. The source electrode and drain electrode can be disposed on the insulating substrate. The metal local gate electrode can be disposed on the insulating substrate. The graphene resonator can be suspended over the metal local gate electrode and define a vacuum gap between the graphene resonator and the metal local gate electrode.
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