Capacitor strap connection structure and fabrication method
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United States of America Patent
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May 1, 2018
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app pub date -
Dec 24, 2014
filing date -
Dec 24, 2014
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Abstract
Structures and methods for deep trench capacitor connections are disclosed. The structure includes a reduced diameter top portion of the capacitor conductor. This increases the effective spacing between neighboring deep trench capacitors. Silicide or additional polysilicon are then deposited to complete the connection between the deep trench capacitor and a neighboring transistor.
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