Honeycomb heaters for integrated circuit manufacturing

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United States of America Patent

PATENT NO 9960059
SERIAL NO

13436263

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Abstract

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A honeycomb heater includes a lamp housing having an outer edge that forms a partial circle. The lamp housing has an opening extending from a top surface to a bottom surface of the lamp housing. The opening further extends from the outer edge into a center region of the lamp housing. A plurality of lamps is distributed throughout the lamp housing, and is configured to emit light out of the top surface of the lamp housing.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN ROAD 6 HSIN-CHU 300-77

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Tze-Liang Hsin-Chu, TW 403 4505
Li, Chii-Horng Zhubei, TW 173 947
Li, Jr-Hung Chupei, TW 83 264
Lin, Yi-Hung Taipei, TW 156 824

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