System for electrical measurements of objects in a vacuumed environment
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United States of America Patent
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May 1, 2018
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app pub date -
Mar 3, 2016
filing date -
Mar 4, 2015
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Abstract
A system for electrically testing an object, the system may include a scanning electron microscope that comprises a column; and nano-probe modules that are mechanically connected to the column; wherein the column is configured to illuminate areas of the object, with a beam of charged particles; wherein nano-probes of the nano-probe modules are configured to electrically contact elements of the object, during electrical tests of the object, wherein the elements of the object are located within the areas of the object.
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