X-ray analyzing system for x-ray scattering analysis
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United States of America Patent
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May 1, 2018
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Mar 6, 2014
filing date -
Mar 15, 2013
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Abstract
An X-ray analyzing system for x-ray scattering analysis having an x-ray source for generating a beam of x-rays propagating along a transmission axis (3), at least one hybrid slit (5b) with an aperture which defines the shape of the cross section of the beam, a sample on which the beam shaped by the hybrid slit (5b) is directed and an X-ray detector for detecting x-rays originating from the sample. The hybrid slit (5b) has at least three hybrid slit elements (7), each hybrid slit element (7) having a single crystal substrate (8) bonded to a base (9) with a taper angle α≠0. The single crystal substrates (8) of the hybrid slit elements (7) limit the aperture and the hybrid slit elements (7) are staggered with an offset along the transmission axis (3). The X-ray analyzing system has improved resolution and signal to noise ratio.
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