Capacitive, ceramic pressure-measuring cell and method for the production thereof
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United States of America Patent
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May 1, 2018
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app pub date -
May 19, 2014
filing date -
Jun 11, 2013
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Abstract
A pressure-measuring cell having a ceramic measuring membrane and a ceramic counter body, wherein the measuring membrane is joined to the counter body in such a way that a pressure chamber is formed between the measuring membrane and the counter body. The pressure-measuring cell also has a capacitive transducer for detecting a pressure-dependent deformation of the measuring membrane, which capacitive transducer has at least one membrane electrode arranged on the measuring membrane and at least one electrode on the counter body side, wherein according to the invention at least one membrane electrode comprises a titanium oxide.
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