Imprinting method and curable composition for imprinting
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United States of America Patent
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May 1, 2018
Issued Date -
N/A
app pub date -
Nov 26, 2013
filing date -
Nov 30, 2012
priority date (Note) -
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Abstract
An imprinting method for forming a pattern of a cured product by irradiating a curable composition for imprinting disposed on a substrate with light while the curable composition is in contact with a mold having surface asperities and removing the mold from a cured product of the curable composition. The method includes bringing the mold into contact with the curable composition in a condensable gas atmosphere, wherein the curable composition for imprinting has a viscosity in the range of 1 cP to 40 cP in air at 23° C., and the condensable gas is introduced between the mold and the curable composition such that the curable composition for imprinting has a condensable gas solubility (gas/(curable composition+gas)) (g/g) in the range of 0.1 to 0.4.
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International Classification(s)
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- C08F:MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONL....
- B29C:SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTAN....
- C09D:COATING COMPOSITIONS, e.g. PAINTS, VARNISHES, LACQ....
- B29K:INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, ....
- G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....
- B29L:INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RE....
- C08L:COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
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