Nano- and micro-electromechanical resonators
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United States of America Patent
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Apr 24, 2018
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N/A
app pub date -
Jul 11, 2017
filing date -
Apr 22, 2013
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Abstract
A resonator including a piezoelectric plate and an interdigital electrode is provided. A ratio between a thickness of the plate and a pitch of the interdigital electrode may be from about 0.5 to about 1.5. A radiation detector including a resonator and an absorber layer capable of absorbing at least one of infrared and terahertz radiation is provided. A resonator including a piezoelectric plate and a two-dimensional electrically conductive material is provided.
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