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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
GIGAPHOTON INC	TOCHIGI COUNTY JAPAN TOCHIGI

International Classification(s)

• H01S:DEVICES USING STIMULATED EMISSION

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Abe, Tooru	Oyama, JP	23	370
Ohta, Takeshi	Oyama, JP	45	426
Tsushima, Hiroaki	Oyama, JP	49	159
Wakabayashi, Osamu	Hiratsuka, JP	394	4239

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Oct 24, 2025
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Oct 24, 2029

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 24, 2018	US,9954340,B2   US9954340B2	GRANTED PATENT AS SECOND PUBLICATION
November 03, 2016	US,20160322772,A1   US20160322772A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9954340

Excimer laser apparatus and excimer laser system

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