Process sheet resistance uniformity improvement using multiple melt laser exposures

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9953851
SERIAL NO

15207226

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Embodiments described herein relate to apparatus and methods of thermal processing. More specifically, apparatus and methods described herein relate to laser thermal treatment of semiconductor substrates by increasing the uniformity of energy distribution in an image at a surface of a substrate.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CALIFORNIA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adams, Bruce E Portland, US 77 1667
Howells, Samuel C Portland, US 45 300
Hunter, Aaron Muir Santa Cruz, US 90 1115
Li, Jiping Palo Alto, US 55 802
Moffatt, Stephen St. Brelade, JE 116 1313
Vellore, Kim San Jose, US 18 679

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Oct 24, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Oct 24, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00