X-ray apparatus and structure manufacturing method

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United States of America Patent

PATENT NO 9953799
SERIAL NO

14668029

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Abstract

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Provided is an X-ray apparatus including: a target configured to generate an X-ray by collision of electrons or transmission of electrons; a filament configured to release the electrons to the target; a housing that has the filament therein; and a first holding member configured to hold a portion of the target disposed on an outer side of the housing on the outer side of the housing.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 140-8601
NIKON METROLOGY NV3001 LEUVEN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hakoda, Fumihiko Tokyo, JP 1 22
Smith, Jim Leuven, BE 17 757
Takahashi, Satoshi Yokohama, JP 385 4847

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