Dual substrate electrostatic MEMS switch with multiple hinges and method of manufacture
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United States of America Patent
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Apr 24, 2018
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N/A
app pub date -
Mar 4, 2016
filing date -
Mar 11, 2015
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Abstract
Systems and methods for forming an electrostatic MEMS switch include forming a movable cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate. The cantilevered beam may be formed by etching the perimeter shape in the device layer of an SOI substrate. An additional void may be formed in the movable beam such that it bends about an additional hinge line as a result of the additional void. This may give the beam and switch advantageous kinematic characteristics.
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