System and method for generating a lithographic image with the use of a digital hologram and a reflective concave in curvilinear surface
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United States of America Patent
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Apr 24, 2018
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Mar 29, 2017
filing date -
Mar 29, 2017
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Abstract
A system for generating a lithographic image contains a alight source that emits a diverging light beam and a reflective concave curvilinear surface onto which the diverging light beam falls and which reflects the diverging beam in the form of a converging beam. A digital hologram, which is coded in accordance with the initial lithographic image either preliminarily or dynamically with the use of a spatial light modulator, is placed into the converging beam between the reflective surface and the image-receiving object. The image of an initial lithographic image formed on the image-receiving object is subsequently used in the processes of microlithography.
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