Imprint device and pattern forming method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Apr 24, 2018
Issued Date -
Sep 10, 2015
app pub date -
Sep 9, 2014
filing date -
Mar 4, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
According to one embodiment, an imprint device includes a holding unit, a mounting unit, a moving unit, a curing unit, a pressing portion, and a detecting portion. The holding unit holds template having a pattern portion pressed onto a transfer portion provided on a substrate. The mounting unit mounts the substrate. The moving unit is provided on at least either the holding unit or the mounting unit. The moving unit moves the holding unit and the mounting unit in directions approaching each other or directions away from each other. The curing unit cures the transfer portion onto which the pattern portion of the template is pressed. The pressing portion pushes the template pressed onto the transfer portion in a direction intersecting a pressing direction of the template. The detecting portion detects a position of the template pushed by the pressing portion.
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