Spatially controlled conductivity in transparent oxide coatings
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United States of America Patent
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Apr 24, 2018
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app pub date -
Mar 13, 2017
filing date -
Mar 13, 2017
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Abstract
A method of coating an optical substrate includes depositing a semiconductor coating over a surface of an optical substrate, wherein the semiconductor coating has broadband optical transmittance. Portions of the semiconductor coating are doped to form a spatially varied pattern of doped semiconductor in the semiconductor coating. The method includes annealing the semiconductor coating to do at least one of: increase oxygen in undoped areas of the semiconductor coating; or reduce oxygen in doped areas of the semiconductor coating.
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