Magnetically shielded probe card
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United States of America Patent
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Apr 24, 2018
Issued Date -
N/A
app pub date -
Oct 30, 2015
filing date -
Oct 30, 2015
priority date (Note) -
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Abstract
A probe card includes a mechanical support fixture having an inner aperture with a plurality of probes secured to the fixture that includes probe tips that extend into the inner aperture for contacting probe pads on die of a wafer to be probed. At least one magnetic shield includes a magnetic material that at least substantially surrounds a projected volume over an area that encloses the probe tips. The magnetic material has a relative magnetic permeability of at least 800.
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