Upstream volume mass flow verification systems and methods
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United States of America Patent
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Apr 24, 2018
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app pub date -
Jun 13, 2014
filing date -
Jul 24, 2009
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Abstract
This disclosure relates to mass flow verification systems for and methods of measuring and verifying the mass flow through a mass flow delivery/measurement device such as a mass flow controller. A mass flow verification system comprises a preset volume, a temperature sensor, and a pressure sensor. The measured verified flow determined by the mass flow verification system can be adjusted to compensate for errors resulting from a dead volume within the mass flow measurement device.
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