Nanowire-based mechanical switching device
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United States of America Patent
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Apr 17, 2018
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N/A
app pub date -
May 10, 2016
filing date -
Mar 14, 2013
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Abstract
Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and a suspended portion. A first gate electrode is disposed adjacent the void, and is spaced apart from the nanowire. A first conductive region is disposed adjacent the first gate electrode and adjacent the void, and is spaced apart from the nanowire.
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