Optical filter and sensor system
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United States of America Patent
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Apr 17, 2018
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N/A
app pub date -
Apr 14, 2016
filing date -
Jul 16, 2012
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Abstract
An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
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