Force feedback electrodes in MEMS accelerometer
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United States of America Patent
Stats
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Apr 17, 2018
Issued Date -
N/A
app pub date -
Jun 3, 2014
filing date -
Mar 14, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
PGS GEOPHYSICAL AS | P O BOX 251 LILLEAKER OSLO 0216 | |
AGENCY FOR SCIENCE TECHNOLOGY AND RESEARCH (A*STAR) | SINGAPORE 138632 |
International Classification(s)

- 2014 Application Filing Year
- G01P Class
- 657 Applications Filed
- 518 Patents Issued To-Date
- 78.85 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Fernando, Sanchitha Nirodha | Singapore, SG | 5 | 27 |
# of filed Patents : 5 Total Citations : 27 | |||
Ocak, Ilker Ender | Singapore, SG | 18 | 74 |
# of filed Patents : 18 Total Citations : 74 | |||
Sun, Chengliang | Singapore, SG | 23 | 87 |
# of filed Patents : 23 Total Citations : 87 | |||
Tsai, Julius Ming-Lin | San Jose, US | 36 | 1038 |
# of filed Patents : 36 Total Citations : 1038 |
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Patent Citation Ranking
- 1 Citation Count
- G01P Class
- 18.75 % this patent is cited more than
- 7 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Oct 17, 2025 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Oct 17, 2029 |
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Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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Date | Code | Event | Description |
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May 14, 2021 | MAFP | MAINTENANCE FEE PAYMENT | free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 4 |
Nov 14, 2017 | I | Issuance | |
Oct 25, 2017 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Sep 11, 2014 | P | Published | |
Mar 05, 2013 | F | Filing | |
Mar 05, 2013 | PD | Priority Date | |
Mar 04, 2013 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BYNUM, ANTHONY EUGENE;JOHNSON, BRADLEY THOMAS;REEL/FRAME:029922/0725 Owner name: RTC INDUSTRIES, INC., ILLINOIS Effective Date: Mar 04, 2013 |

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