Force feedback electrodes in MEMS accelerometer

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United States of America Patent

PATENT NO 9945968
SERIAL NO

14295080

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Abstract

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A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

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Patent Owner(s)

Patent OwnerAddress
PGS GEOPHYSICAL ASP O BOX 251 LILLEAKER OSLO 0216
AGENCY FOR SCIENCE TECHNOLOGY AND RESEARCH (A*STAR)SINGAPORE 138632

International Classification(s)

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  • 2014 Application Filing Year
  • G01P Class
  • 657 Applications Filed
  • 518 Patents Issued To-Date
  • 78.85 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2014201520162017201820192020202120220255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fernando, Sanchitha Nirodha Singapore, SG 5 27
Ocak, Ilker Ender Singapore, SG 18 74
Sun, Chengliang Singapore, SG 23 87
Tsai, Julius Ming-Lin San Jose, US 36 1038

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  • 1 Citation Count
  • G01P Class
  • 18.75 % this patent is cited more than
  • 7 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges572172441101 - 1011 - 2021 - 3031 - 4041 - 500102030405060708090100110120130140150160170180190200210220230

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