Metal/ceramic bonding substrate and method for producing same
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United States of America Patent
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Apr 17, 2018
Issued Date -
N/A
app pub date -
Nov 20, 2012
filing date -
Nov 20, 2012
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Abstract
After a wet blasting treatment for jetting a slurry, which contains spherical alumina as abrasive grains in a liquid, to the surface of a ceramic substrate 10 of aluminum nitride sintered body so that the ceramic substrate 10 has a residual stress of not higher than −50 MPa and so that the surface of the ceramic substrate 10 to be bonded to the metal plate 14 has an arithmetic average roughness Ra of 0.15 to 0.30 μm, a ten-point average roughness Rz of 0.7 to 1.1 μm and a maximum height Ry of 0.9 to 1.7 μm while causing the ceramic substrate to have a flexural strength of not higher than 500 MPa and causing the thickness of a residual stress layer 10a formed along the surface of the ceramic substrate 10 to be 25 μm or less, the metal plate 14 of copper or a copper alloy is bonded to the ceramic substrate 10, which is obtained by the wet blasting treatment, via a brazing filler metal 12 to produce a metal/ceramic bonding substrate which has an excellent bonding strength of the ceramic substrate 10 to the metal plate 14 and which has an excellent heat cycle resistance.

First Claim
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
TOKUYAMA CORPORATION | YAMAGUCHI |
International Classification(s)
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- C04B:LIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREO....
- B23K:SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLA....
- B21D:WORKING OR PROCESSING OF SHEET METAL OR METAL TUBE....
- H05K:PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAIL....
- B32B:LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA....

- [Classification Symbol]
- [Patents Count]
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Aoki, Hiroto | Yamaguchi, JP | 1 | 5 |
Kanechika, Yukihiro | Yamaguchi, JP | 24 | 86 |
Kitamura, Yukihiro | Nagano, JP | 12 | 45 |
Osanai, Hideyo | Nagano, JP | 39 | 223 |
Sugawara, Ken | Yamaguchi, JP | 11 | 284 |
Takeda, Yasuko | Ibaraki, JP | 4 | 62 |
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