Method for randomly texturing a semiconductor substrate
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United States of America Patent
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Apr 10, 2018
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app pub date -
Jun 2, 2015
filing date -
Jun 4, 2014
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Abstract
The invention relates to a method for texturing a semiconductor substrate (1), comprising steps consisting in forming a plurality of cavities of random shapes, depths and distribution, in an etch mask (2), by means of non-homogeneous reactive-ion etching, forming a first rough random design, and etching the substrate using the etch mask, by means of reactive-ion etching, in such a way as to transfer the first rough random design into the substrate and to produce a second rough random design (200), comprising cavities (20) of random shapes, depths (d2r) and distribution, on the surface of the substrate.
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