Resolution enhancement techniques based on holographic imaging technology
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United States of America Patent
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Apr 10, 2018
Issued Date -
N/A
app pub date -
May 22, 2015
filing date -
May 23, 2014
priority date (Note) -
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Abstract
Systems and techniques for performing resolution enhancement on target patterns based on holographic imaging technique (HIT) are described. During operation, an electronic design automation (EDA) tool can compute an in-line hologram of the target patterns based on parameters associated with a photolithography process that is used in a semiconductor manufacturing process, wherein the semiconductor manufacturing process is to be used for printing the target patterns on a semiconductor wafer. Next, the EDA tool can determine the mask patterns based on the in-line hologram.
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Patent Citation Ranking
- 1 Citation Count
- G06T Class
- 22.86 % this patent is cited more than
- 7 Age
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