Nano- and Microelectromechanical Resonators

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United States of America Patent

SERIAL NO

15652954

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Abstract

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A resonator includes a piezoelectric plate and interdigitated electrode(s). The interdigitated electrode includes a plurality of conductive strips disposed over a top surface of the piezoelectric plate. A two-dimensional mode of mechanical vibration is excited in a cross sectional plane of the piezoelectric plate in response to an alternating voltage applied through the interdigitated electrode. The two-dimensional mode of mechanical vibration is a cross-sectional Lamé mode resonance (CLMR) or a degenerate cross-sectional Lamé mode resonance (dCLMR).

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Patent Owner(s)

Patent OwnerAddress
NORTHEASTERN UNIVERSITYC/O THE CENTER FOR RESEARCH INNOVATION 360 HUNTINGTON AVENUE BOSTON MA 02115

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CASSELLA, Cristian East Boston, US 15 102
HUI, Yu Billerica, US 40 601
QIAN, Zhenyun Boston, US 12 371
RINALDI, Matteo Boston, US 32 487

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