Family

Loading Family data...

• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
METAVC PATENT HOLDING COMPANY	18357 FADJUR LANE SISTERS OR 97759

International Classification(s)

• H01Q:AERIALS
• G01S:RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMI....

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bowers, Jeffrey A	Bellevue, US	129	2304
# of filed Patents : 129 Total Citations : 2304
Brady, David Jones	Durham, US	30	724
# of filed Patents : 30 Total Citations : 724
Driscoll, Tom	San Diego, US	88	2013
# of filed Patents : 88 Total Citations : 2013
Hunt, John Desmond	Knoxville, US	33	1484
# of filed Patents : 33 Total Citations : 1484
Hyde, Roderick A	Redmond, US	2911	61857
# of filed Patents : 2911 Total Citations : 61857
Landy, Nathan Ingle	Mercer Island, US	32	1355
# of filed Patents : 32 Total Citations : 1355
Lipworth, Guy Shlomo	Durham, US	8	235
# of filed Patents : 8 Total Citations : 235
Mrozack, Alexander	Durham, US	8	342
# of filed Patents : 8 Total Citations : 342
Smith, David R	Durham, US	334	7609
# of filed Patents : 334 Total Citations : 7609
Tegreene, Clarence T	Mercer Island, US	1905	49070
# of filed Patents : 1905 Total Citations : 49070

Cited Art Landscape

Load Citation

• No Cited Art to Display

Loading Cited Art Landscape...

Patent Citation Ranking

• 11 Citation Count
• H01Q Class

• 88.16 % this patent is cited more than
• 7 Age

Forward Cite Landscape

Load Citation

• No Forward Cites to Display

Loading Forward Cite Landscape...

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Oct 3, 2025
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Oct 3, 2029

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 03, 2018	US,9935375,B2   US9935375B2	GRANTED PATENT AS SECOND PUBLICATION
June 11, 2015	US,20150162658,A1   US20150162658A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9869934

Collector in an extreme ultraviolet lithography system with optimal air curtain protection

---

Abstract

---

The present disclosure provides an extreme ultraviolet (EUV) lithography system. The EUV lithography system includes a collector having a coating surface designed to collect and reflect EUV radiation; a gas supply module; and a gas pipeline integrated with the collector and connected to the gas supply module. The gas pipeline includes inward and outward entrances into the collector. The inward and outward entrances are configured and operable to form a gas curtain on the coating surface of the collector.

---

 

---

Description

---

Claims

---

Claims data not available

---

Legal Events

• No Legal Status data available.