Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method
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United States of America Patent
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Mar 27, 2018
Issued Date -
N/A
app pub date -
Mar 31, 2016
filing date -
Mar 31, 2015
priority date (Note) -
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Abstract
In a gas purge apparatus, a load port apparatus, an installation stand for a purging container, and a gas purge method, the inside of the purging container can be filled with a cleaning gas without inclining the purging container. A control means drives a nozzle driving mechanism to move a purge nozzle toward a purge port based on a fixing detection signal detected by a fixing detection sensor showing that the purging container is fixed on a table.
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