Apparatus and algorithm for carrier profiling in scanning frequency comb microscopy
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United States of America Patent
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Mar 27, 2018
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app pub date -
Mar 2, 2017
filing date -
Mar 9, 2016
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Abstract
A semiconductor carrier profiling method utilizes a scanning tunneling microscope and shielded probe with an attached spectrum analyzer to measure power loss of a microwave frequency comb generated in a tunneling junction. From this power loss and by utilizing an equivalent circuit or other model, spreading resistance may be determined and carrier density from the spreading resistance. The methodology is non-destructive of the sample and allows scanning across the surface of the sample. By not being destructive, additional analysis methods, like deconvolution, are available for use.
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