Methods of forming molybdenum sputtering targets

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United States of America Patent

PATENT NO 9926623
SERIAL NO

15061566

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Abstract

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In various embodiments, sputtering targets are formed by introducing molybdenum powder into a sheet bar mold, pressing the powder to form a sheet bar, sintering the sheet bar to form an ingot having a density of at least 90% of a theoretical density, preheating the ingot, rolling the ingot to form a plate, and heat treating the plate.

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Patent Owner(s)

Patent OwnerAddress
H C STARCK SOLUTIONS COLDWATER LLC460 JAY STREET COLDWATER MI 49036

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Daily,, III James G Marshall, US 5 15
Hirt, Joseph Cypress, US 10 90
Kumar, Prabhat Framingham, US 94 1335
Lemon, Brad Battle Creek, US 7 74
Meendering, David Coldwater, US 7 87
Miller, Steven A Canton, US 86 1526
O'Grady, Jerome Hudson Village, US 6 74
Rozak, Gary Akron, US 16 231
Schwartz, David G Mentor, US 6 194
Welling, Timothy Portage, US 6 74
Wu, Rong-chein Richard North Chelmsford, US 17 223

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