Magnetic nanomechanical devices for stiction compensation

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United States of America Patent

PATENT NO 9926193
SERIAL NO

15301337

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Abstract

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Nanoelectromechanical (NEMS) devices having nanomagnets for an improved range of operating voltages and improved control of dimensions of a cantilever are described. For example, in an embodiment, a nanoelectromechanical (NEMS) device includes a substrate layer, a first magnetic layer disposed above the substrate layer, a first dielectric layer disposed above the first magnetic layer, a second dielectric disposed above the first dielectric layer, and a cantilever disposed above the second dielectric layer. The cantilever bends from a first position to a second position towards the substrate layer when a voltage is applied to the cantilever.

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Patent Owner(s)

Patent OwnerAddress
INTEL CORPORATION2200 MISSION COLLEGE BOULEVARD SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Seiyon Portland, US 87 1971
Kuhn, Kelin J Aloha, US 90 2639
Lin, Kevin Beaverton, US 166 1997
Munoz, Jorge A Hillsboro, US 3 36
Nikonov, Dmitri E Beaverton, US 125 1706
Pawashe, Chytra Beaverton, US 16 81
Theofanis, Patrick Pasadena, US 8 6

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