Blockage detection for a microelectromechanical systems sensor

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United States of America Patent

PATENT NO 9924288
SERIAL NO

14527235

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Abstract

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Systems and techniques for detecting blockage associated with a microelectromechanical systems (MEMS) microphone of a device are presented. The device includes a MEMS acoustic sensor and a processor. The MEMS acoustic sensor is contained in a cavity within the device. The processor is configured to detect a blockage condition associated with an opening of the cavity that contains the MEMS acoustic sensor.

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Patent Owner(s)

Patent OwnerAddress
INVENSENSE INC1745 TECHNOLOGY DRIVE SUITE 200 SAN JOSE CA 95110

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berger, Renata Melamud Palo Alto, US 19 403
Cagdaser, Baris Sunnyvale, US 49 426
Khenkin, Aleksey S Nashua, US 51 532
Oliaei, Omid Sunnyvale, US 48 538

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