High temperature sensors and transducers
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United States of America Patent
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Mar 20, 2018
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app pub date -
May 4, 2015
filing date -
May 7, 2014
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Abstract
A high temperature piezoelectric sensor device such as a high temperature accelerometer, force sensor, pressure sensor, temperature sensor, acoustic sensor and/or acoustic transducer for use at temperatures up to 1000° C. The high temperature device includes a base, a piezoelectric element attached to the base and a pair of electrodes in electrical communication with the piezoelectric element. The piezoelectric element can have a d15 piezoelectric coefficient between 16.0-18.0 pC/N for all temperatures between 25 to 700° C., and a rotated d33 piezoelectric coefficient of 8.0-9.5 pC/N with zero face shear/thickness shear piezoelectric coefficients d34. d35 and d36 in the same temperature range. The piezoelectric element can also have an electromechanical coupling factor k15 variation of less than 7%, and d15 and rotated d33 piezoelectric coefficient variations of less than 5% for temperatures between 25 to 700° C. The piezoelectric element can have high electrical resistivity, being on the order of >107 Ω·cm at 600° C. The piezoelectric element can be an A2BC2O8 piezoelectric material with a Fresnoite structure and A=Ca, Sr, Ba, Mg; B=Ti, Zr, Hf, V; and C=Si, Ge, Sn.
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