Substrate gripping device and substrate processing apparatus
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United States of America Patent
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Mar 20, 2018
Issued Date -
N/A
app pub date -
Apr 8, 2014
filing date -
Apr 9, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A rotary table; a drive motor M configured to rotate the rotary table; a pin base supported by the rotary table; a pin fixing member configured to move closer to or away from C1 upon the pin base revolving; first chuck pins and second chuck pins provided on the pin fixing member and configured to be into contact with an outer edge of the substrate W; a substrate gripping force generation mechanism including a spring member; a chuck pin switching mechanism including an inertia member configured to be rotated coaxially with the rotary table and a protruded member provided on an outer peripheral part of the inertia member; and a cam member provided on the pin fixing member and configured to engage with protruded member.
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