Electrostatic heating substrate holder which is polarised at high voltage

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United States of America Patent

PATENT NO 9922856
SERIAL NO

15117024

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Abstract

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The present invention relates to a support comprising:

    an electrically conductive biased table (10) connected to a high voltage power supply (12) and supported on an electrically insulating stand (40);an electrically insulating substrate carrier (20) in the form of a cylinder, its top face presenting a bearing plane designed to receive a substrate (50);legs (15) standing on the biased table (10) in order to support the bottom face of the substrate carrier (20); andat least one electrically conductive connection (201, 202, 203, 31, 30) for connecting the bearing plane to the biased table (10).

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Patent Owner(s)

Patent OwnerAddress
ION BEAM SERVICESZI PEYNIER-ROUSSET RUE GASTON IMBERT PROLONGÉE PEYNIER F-13790

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Roux, Laurent Marseilles, FR 28 46
Torregrosa, Frank Simiane, FR 16 28

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