Method for inspecting a specimen and charged particle multi-beam device
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United States of America Patent
Stats
-
Mar 20, 2018
Issued Date -
N/A
app pub date -
Dec 1, 2016
filing date -
Dec 1, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method for inspecting a specimen with an array of primary charged particle beamlets in a charged particle beam device having an optical axis. The method includes generating a primary charged particle beam; illuminating a multi-aperture lens plate with the primary charged particle beam to generate the array of primary charged particle beamlets; and correcting a field curvature of the charged particle beam device with a first and a second field curvature correction electrode. The method further includes applying a voltage to the first and to the second field curvature correction electrode. At least one of the field strength provided by the first and the second field curvature correction electrode varies in a plane perpendicular to the optical axis of the charged particle beam device. The method further includes focusing the primary charged particle beamlets on separate locations on the specimen with an objective lens.
First Claim
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International Classification(s)
- 2016 Application Filing Year
- H01J Class
- 2255 Applications Filed
- 1758 Patents Issued To-Date
- 77.97 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 8 Citation Count
- H01J Class
- 31.16 % this patent is cited more than
- 7 Age
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