Photoacid-generating compound, polymer derived therefrom, photoresist composition including the photoacid-generating compound or polymer, and method of forming a photoresist relief image

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United States of America Patent

PATENT NO 9921475
SERIAL NO

15252522

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Abstract

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A photoacid-generating compound has the structure

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Patent Owner(s)

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DUPONT ELECTRONIC MATERIALS INTERNATIONAL LLC455 FOREST STREET MARLBOROUGH MA 01752

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aqad, Emad Northborough, US 70 229
Liu, Cong Shrewsbury, US 200 768
Williams,, III William Ipswich, US 10 33

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