Grid polarization element, and optical alignment device
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United States of America Patent
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Mar 20, 2018
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app pub date -
Sep 29, 2015
filing date -
Sep 30, 2014
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Abstract
An absorptive grid polarization element includes a transparent substrate, and a stripe-like grid provided on the transparent substrate. Each of a plurality of linear parts which form the grid absorbs more s polarization light than p polarization light, and thus achieves a polarizing action. The transparent substrate is made of quartz glass. Each of the linear parts includes a second layer formed on the transparent substrate, and a first layer formed on the second layer. The first layers are formed from amorphous titanium oxide. The second layers are formed from amorphous silicon.
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