Sensor system utilizing piezoelectric microcantilever coupled with resonating circuit

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United States of America Patent

PATENT NO 9921226
SERIAL NO

14778779

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Abstract

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An interchangeable sensor system is described, including: a microcantilever including a beam anchored at a first end, the beam being free to vibrate on another end, wherein a piezoelectric layer is deposited on a surface of the beam; an input configured to receive a voltage from a voltage source for applying voltage to the piezoelectric layer; and a resonating circuit including: the piezoelectric layer, configured as a capacitor of the resonant circuit; and one or more additional electrical elements; wherein the voltage source is configured to apply a first AC voltage under a first condition for actuating the microcantilever at a first mechanical resonating frequency of the microcantilever and a second AC voltage under a second condition for actuating the microcantilever at a second electrical resonating frequency of the resonating circuit. Method of using the sensor system is also described.

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Patent Owner(s)

Patent OwnerAddress
NORTHEASTERN UNIVERSITYC/O THE CENTER FOR RESEARCH INNOVATION 360 HUNTINGTON AVENUE BOSTON MA 02115

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Faegh, Samira Boston, US 1 0
Jalili, Nader Newton, US 1 0
Sridhar, Srinivas Newton, US 17 226

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