Measurement value correction method, computer-readable recording medium, and measurement device
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United States of America Patent
Stats
-
Mar 20, 2018
Issued Date -
N/A
app pub date -
Oct 30, 2015
filing date -
Nov 7, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A measurement value correction method according to the present invention is a measurement value correction method for correcting a measurement value obtained by tracing a surface of a work piece with a stylus, and including a step of preparing a plurality of work pieces made from same design data, a step of adopting one of the work pieces as a master work piece and obtaining a reference measurement value with the stylus, a step of obtaining calibration data based on a difference between the reference measurement value and the design data, a step of adopting one of the plurality of work pieces other than the master work piece as a measurement target work piece and obtaining a target measurement value with the stylus, and a step of obtaining a corrected measurement value by correcting the target measurement value by using the calibration data.
First Claim
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Family
International Classification(s)
- 2015 Application Filing Year
- G06F Class
- 57200 Applications Filed
- 45873 Patents Issued To-Date
- 80.20 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G06F Class
- 0 % this patent is cited more than
- 7 Age
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