Thickness measuring apparatus and thickness measuring method
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United States of America Patent
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Mar 20, 2018
Grant Date -
Jan 8, 2015
app pub date -
Jul 3, 2014
filing date -
Jul 5, 2013
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Abstract
Provided are a thickness measuring apparatus and a thickness measuring method. The thickness measuring method includes irradiating a first laser beam of a first wavelength λ1 to a transparent substrate and measuring intensity of the first laser beam transmitting through the transparent substrate; irradiating a second laser beam of a second wavelength λ2 to the transparent substrate and measuring intensity of the second laser beam transmitting through the transparent substrate; and extracting a rotation angle on a Lissajous graph using the first and second laser beams transmitting through the transparent substrate. A phase difference between adjacent rays by multiple internal reflection of the first laser beam and a phase difference between adjacent rays by multiple internal reflection of the second laser beam is maintained at π/2.
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