Methods of preparing nanodevices
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United States of America Patent
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Mar 20, 2018
Grant Date -
Oct 20, 2016
app pub date -
Jan 26, 2015
filing date -
Jan 24, 2014
priority date (Note) -
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Abstract
The present invention relates to novel nano- and micro-electromechanical devices and novel methods of preparing them. In one aspect, the invention includes methods of preparing a nanodevice. In certain embodiments, the methods comprise coating a polymer layer with a first at least one thin solid material layer using atomic layer deposition (ALD), thus forming an ALD-generated layer. In other embodiments, the methods comprise patterning the first at least one thin solid material layer to form a nanodevice. In yet other embodiments, the methods comprise releasing the nanodevice from the polymer layer.
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International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- B05D:PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MAT....
- B82Y:SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; ....
- B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
- B82B:NANO-STRUCTURES; MANUFACTURE OR TREATMENT THEREOF
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